Beam projection

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Due to the small grazing-incidence angle, the beam height in GISAXS becomes projected into a long stripe along the sample. Thus GISAXS is always averaging over a large sample surface area. This implies that one must be careful that the sample is relatively homogeneous over the illuminated area.

Examples

beam height incident angle projection notes
(μm) (°) (mm)
50 0.05 57 [1]
50 0.10 29 [2]
50 0.12 24 [3]
50 0.15 19 [4]
50 0.20 14 [5]
50 0.40 7 [6]