Beam projection
Due to the small grazing-incidence angle, the beam height in GISAXS becomes projected into a long stripe along the sample. Thus GISAXS is always averaging over a large sample surface area. This implies that one must be careful that the sample is relatively homogeneous over the illuminated area.
Examples
beam height | incident angle | projection | notes |
---|---|---|---|
(μm) | (°) | (mm) | |
50 | 0.05 | 57 | [1] |
50 | 0.10 | 29 | [2] |
50 | 0.12 | 24 | [3] |
50 | 0.15 | 19 | [4] |
50 | 0.20 | 14 | [5] |
50 | 0.40 | 7 | [6] |