Material:Silicon dioxide

From GISAXS
Jump to: navigation, search

Silicon dioxide (SiO2), also known as silica, spontaneously forms on the surface of a silicon wafer exposed to air. This 'native oxide' must be included in calculations of (for example) the x-ray reflectivity curve for a Si surface. In terms of x-ray properties, SiO2 can be used to approximate a variety of related materials (fused quartz, glass, etc.).

Properties

  • Density: 2.648 g/cm3
  • Neutron SLD: 4.183×10−6 Å−2
Material density (g/cm3) X-ray energy (keV) X-ray wavelength (Å) critical angle (°) qc−1) SLD (10−6Å−2)
SiO2 2.648 2.0 6.20 0.927 0.0328 21.42
4.0 3.10 0.480 0.0340 22.96
8.0 1.55 0.239 0.0338 22.71
12.0 1.03 0.159 0.0337 22.58
16.0 0.77 0.119 0.0337 22.53
24.0 0.52 0.079 0.0336 22.48

SiO2-n.png

SiO2-crit.pngSiO2-crit zoom.png

SiO2-critq.pngSiO2-SLD.png

SiO2-AttLen.pngSiO2-mu.png

See Also